radio frequency sputtering

Through analysis we review methods fabricating thin film cathode, including chemical acetate base solution technique, sol-gel method, laser ablation, plasma enhanced chemical vapor deposition, pulsed laser deposition, radio frequency magnetron sputtering deposition, and electrostatic spray deposition.

评论了近年来制备薄膜阴极的方法，包括化学酸基溶解法、溶胶-凝胶法、激光焙烧法、增强型等离子体化学气相淀积法、脉冲激光法、电子束喷射沉积法和射频磁控溅射法。

Metal aluminum films were deposited on AAO templates by radio frequency magnetron sputtering.

用射频磁控溅射法在阳极氧化铝模板表面制备了金属铝膜.

Boron carbon nitride ( BCN ) thin films were deposited by radio frequency ( RF ) magnetron sputtering .

采用射频 磁控溅射 技术制备出硼碳氮 ( BCN ) 薄膜.

Some main contents and innovations in this paper are listed as follows: I. Copper nitride thin films were prepared by reactive radio-frequency magnetron sputtering of pure Cu target on glass substrates with various N2 flow rate.

主要内容和创新点如下：Ⅰ.以纯铜靶和氮气为原料，采用反应射频磁控溅射法在玻璃基底上成功制备了氮化铜纳米薄膜。

The Gd-Co films reported here were prepared by radio frequency sputtering and have been proved to have uniaxial anisotropy perpendicular to the film plane.

用射频溅射的方法制备得的钆钴膜具有垂直于膜面的单轴各向异性。